033394
Distance measuring system: Optical incremental
Range: 4 mm
Resolution: 10 nm standard
Linearity: Way: < 200 nm to measuring range
Linearity: Force: 0…1400 mN < 0,3% to measuring range
Generating of measuring forces: electro-mechanically
Measuring force: 0,05 mN…1,4 N or 10 N
Measurement force resolution: 0,6 mN (600 μN)